Development of a low angle forward reflected neutral oxygen beam for materials processing

نویسندگان

  • D. H. Lee
  • J. W. Bae
  • S. D. Park
  • G. Y. Yeom
چکیده

In the fabrication of new silicon-based devices any process-related damage such as electrical charging and surface modification, remaining during the processing, may cause problems due to the size limitation of the devices. Therefore, less damaging etching processes are required. In this study, a neutral oxygen beam was formed using a low angle forward reflected neutral beam technique and studied to determine the possibility of it being used as an anisotropic etching technique without charging. The degree of neutralization and etch characteristics were also investigated. When an ion beam was reflected at a reflection angle 158 (the angle between ion beam direction and the reflector surface), most of the ions reflected were neutralized and lower reflection angles gave higher degrees of neutralization. Complete neutralization of the ions in the reflected beam could be made by installing a retarding grid system between the sample and the reflector and by applying a potential higher than the maximum ion energy of the beam. Photoresist (PR) etching was carried out with the neutralized oxygen radical flux and anisotropic etch profiles could be obtained suggesting a directional neutral beam. 2001 Elsevier Science B.V. All rights reserved.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Giant Goos-Häenchen Shift of a Gaussian Beam Reflected from One-Dimensional Photonic Crystals Containing Left-Handed Lossy Metamaterials

We perform a theoretical investigation on the Goos-Häenchen shift (the lateral shift) in one-dimensional photonic crystals (1DPCs) containing left-handed (LH) metamaterials. The effect was studied by use of a Gaussian beam. We show that the giant lateral displacement is due to the localization of the electromagnetic wave which can be both positive and negative depending on the incidence angle o...

متن کامل

A comparative study of trunk proprioception between patients with chronic non-specific low back pain and discopathic low back pain

Introduction: Low back pain is one of the most common disorders in modern society. Disturbed properioception can be a possible cause of low back pain and can cause recurrence of low back pain. Previous studies have shown that low back pain reduces proprioception due to instability in the low back. Since the degenerative process of disc herniation is one of the important factors in exacerbating ...

متن کامل

بررسی حس وضعیت گردن در افراد مبتلا به جلوآمدگی سر و مقایسه آن با افراد سالم

Objective: One of the most common faulty posture of cervical spine is forward head posture (FHP). According to biomechanical changes in the muscles and ligaments of the neck which are rich source of mechanoreceptors, proprioception possibly impaired in forward head posture. Assessment of neck repositioning angles can be an indicator to assess proprioception of this region .The aim of this study...

متن کامل

A comparative study of the immediate, late and lasting effect of Kinesio taping and stabilization exercises on neck proprioception in people with forward head posture: A double-blinded randomized clinical trial

Introduction: Previous researches show that there is a meaningful relationship between forward head posture and dysfunction of proprioception. The purpose of this study was to compare the immediate, late and last effect of kinesio taping (KT) and stabilization exercise (SE) on neck proprioception in people with forward head posture. Materials and Methods: In this clinical trial study, forty thr...

متن کامل

Altitude measurement using laser beam reflected from water surface

In this paper altitude measurement from water surface using laser beam is presented. Research data indicate that the reflection of infrared waves from water surface is about zero and it is less than 2% for visible radiations. Phase-shift and heterodyne technique was used for the measurement, and the laser beam ( mW p nm 10 , 700 = = l ) was modulated by a sine wave having a fixed frequency....

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2001